Inventor
ENGELKE HELMUT
DE8 patents
Patents
8 patentsUS4426584AJan 17, 1984
Method of compensating the proximity effect in electron beam projection systems
IBM70 citations95
US4417946ANov 29, 1983
Method of making mask for structuring surface areas
IBM34 citations92
US4591540AMay 27, 1986
Method of transferring a pattern into a radiation-sensitive layer
IBM39 citations91
US4504558AMar 12, 1985
Method of compensating the proximity effect in electron beam projection systems
IBM26 citations81
US4342817AAug 3, 1982
Mask for structuring surface areas, and method of making it
IBM14 citations73
US5166888ANov 24, 1992
Fabrication of particle beam masks
IBM12 citations72
US4513203AApr 23, 1985
Mask and system for mutually aligning objects in ray exposure systems
IBM19 citations72
US4334156AJun 8, 1982
Method of shadow printing exposure
IBM14 citations72