Inventor

HANAWA KENICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “HANAWA KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US10229815B2Mar 12, 2019

Plasma etching apparatus and method

TOKYO ELECTRON LTD6 citations83

US10861678B2Dec 8, 2020

Plasma etching apparatus and method

TOKYO ELECTRON LTD4 citations72

KOSHIISHI AKIRA

1 patent

US8852385B2Oct 7, 2014

Plasma etching apparatus and method

KOSHIISHI AKIRA12 citations83