Inventor

DE LARIOS JOHN MARTIN

US3 patents

⚠️ This page may combine multiple inventors who share the name “DE LARIOS JOHN MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US6488040B1Dec 3, 2002

Capillary proximity heads for single wafer cleaning and drying

LAM RES CORP178 citations96

US6616772B2Sep 9, 2003

Methods for wafer proximity cleaning and drying

LAM RES CORP110 citations95

ONTRAK SYSTEMS INC

1 patent

US5806126ASep 15, 1998

Apparatus for a brush assembly

ONTRAK SYSTEMS INC97 citations93