Inventor
OKUBO KAZUYA
JP30 patents
⚠️ This page may combine multiple inventors who share the name “OKUBO KAZUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS6251188B1Jun 26, 2001
Apparatus for forming laminated thin films or layers
TOKYO ELECTRON LTD60 citations96
US6022586AFeb 8, 2000
Method and apparatus for forming laminated thin films or layers
TOKYO ELECTRON LTD54 citations96
US6913996B2Jul 5, 2005
Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring
TOKYO ELECTRON LTD20 citations92
US9551068B2Jan 24, 2017
Film forming method and film forming apparatus
TOKYO ELECTRON LTD12 citations82
US6404021B1Jun 11, 2002
Laminated structure and a method of forming the same
TOKYO ELECTRON LTD8 citations73
US6245673B1Jun 12, 2001
Method of forming tungsten silicide film
TOKYO ELECTRON LTD7 citations73
US11551930B2Jan 10, 2023
Methods to reshape spacer profiles in self-aligned multiple patterning
TOKYO ELECTRON LTD1 citations62
US6821874B2Nov 23, 2004
Method for depositing tungsten silicide film and method for preparing gate electrode/wiring
TOKYO ELECTRON LTD0 citations52
US7592256B2Sep 22, 2009
Method of forming tungsten film
TOKYO ELECTRON LTD1 citations51
US6489208B2Dec 3, 2002
Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline silicon
TOKYO ELECTRON LTD0 citations51
AKIYAMA SHINICHI
4 patentsUS8551832B2Oct 8, 2013
Method for manufacturing semiconductor device
AKIYAMA SHINICHI3 citations62
US8338953B2Dec 25, 2012
Method of manufacturing a semiconductor device and semiconductor device
AKIYAMA SHINICHI2 citations62
US8148262B2Apr 3, 2012
Method for manufacturing semiconductor device
AKIYAMA SHINICHI3 citations60
US8536708B2Sep 17, 2013
Method of manufacturing a semiconductor device and semiconductor device
AKIYAMA SHINICHI0 citations51
SOCIONEXT INC
3 patentsTORAY INDUSTRIES
3 patentsUS12304183B2May 20, 2025
Flame-resistant layered molded article
TORAY INDUSTRIES0 citations51
US12234326B2Feb 25, 2025
Polyphenylene sulfide resin composition and molded article
TORAY INDUSTRIES0 citations48
US11241818B2Feb 8, 2022
Pipe-shaped integrally molded article and production method for pipe-shaped integrally molded article
TORAY INDUSTRIES0 citations48