Inventor
RHYINS PETER
US3 patents
Patents
3 patentsUS6828068B2Dec 7, 2004
Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
PHOTRONICS INC36 citations93
US7074530B2Jul 11, 2006
Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
PHOTRONICS INC13 citations90
US7473500B2Jan 6, 2009
Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
PHOTRONICS INC9 citations81