Inventor

UMEHARA NAOTO

US3 patents

⚠️ This page may combine multiple inventors who share the name “UMEHARA NAOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US8030216B2Oct 4, 2011

Method of making semiconductor device

TOKYO ELECTRON LTD2 citations58

US7405160B2Jul 29, 2008

Method of making semiconductor device

TOKYO ELECTRON LTD3 citations58

SANDISK TECHNOLOGIES LLC

1 patent

US10847376B2Nov 24, 2020

In-situ deposition and etch process and apparatus for precision patterning of semiconductor devices

SANDISK TECHNOLOGIES LLC4 citations70