Inventor

VAN DEN HEUVEL LEONARDA HENDRIKA

NL2 patents

⚠️ This page may combine multiple inventors who share the name “VAN DEN HEUVEL LEONARDA HENDRIKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VAN BOXTEL FRANK JOHANNES JACOBUS

1 patent

US9811007B2Nov 7, 2017

Lithographic apparatus and method of cooling a component in a lithographic apparatus

VAN BOXTEL FRANK JOHANNES JACOBUS2 citations67

VAN DER GAAG MARC LÉON

1 patent

US9575406B2Feb 21, 2017

Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method

VAN DER GAAG MARC LÉON1 citations37