Inventor

RIGGS BRENT A

US2 patents

Patents

2 patents

US10707107B2Jul 7, 2020

Adaptive alignment methods and systems

KLA TENCOR CORP2 citations65

US10692227B2Jun 23, 2020

Determination of sampling maps for alignment measurements based on reduction of out of specification points

KLA TENCOR CORP1 citations54