Inventor
IKEBE RYOJI
JP7 patents
Patents
7 patentsUS10217628B2Feb 26, 2019
Substrate processing apparatus and processing method of substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US10707109B2Jul 7, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations70
US12300524B2May 13, 2025
Substrate processing system
TOKYO ELECTRON LTD0 citations61
US11018035B2May 25, 2021
Substrate processing system
TOKYO ELECTRON LTD0 citations61
US10128137B2Nov 13, 2018
Management method of substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations51
US11011436B2May 18, 2021
Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations50
US10713772B2Jul 14, 2020
Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium
TOKYO ELECTRON LTD0 citations37