Inventor

BARTELS ANTHONY L

US4 patents

⚠️ This page may combine multiple inventors who share the name “BARTELS ANTHONY L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM IPEC CORP

2 patents

US5961369AOct 5, 1999

Methods for the in-process detection of workpieces with a monochromatic light source

SPEEDFAM IPEC CORP61 citations95

US5993289ANov 30, 1999

Methods for the in-process detection of workpieces in a CMP environment

SPEEDFAM IPEC CORP19 citations92

SPEEDFAM CORP

2 patents

US5733171AMar 31, 1998

Apparatus for the in-process detection of workpieces in a CMP environment

SPEEDFAM CORP71 citations95

US5823853AOct 20, 1998

Apparatus for the in-process detection of workpieces with a monochromatic light source

SPEEDFAM CORP36 citations92