P

Inventor

NORDIN MICHAEL

US7 patents
⚠️ This page may combine multiple inventors who share the name “NORDIN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents
US11024531B2Jun 1, 2021

Optimized low energy / high productivity deposition system

LAM RES CORP4 citations70
US12322641B2Jun 3, 2025

Mechanical indexer for multi-station process module

LAM RES CORP0 citations58
US12272583B2Apr 8, 2025

Reduced footprint wafer handling platform

LAM RES CORP0 citations47

NOVELLUS SYSTEMS INC

2 patents
US7960297B1Jun 14, 2011

Load lock design for rapid wafer heating

NOVELLUS SYSTEMS INC44 citations96
US8052419B1Nov 8, 2011

Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation

NOVELLUS SYSTEMS INC23 citations90

RIVKIN MICHAEL

1 patent
US8273670B1Sep 25, 2012

Load lock design for rapid wafer heating

RIVKIN MICHAEL16 citations87

NORDIN MICHAEL

1 patent
US8920162B1Dec 30, 2014

Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation

NORDIN MICHAEL9 citations77