P

Inventor

KONAGA KAZUYA

JP5 patents
⚠️ This page may combine multiple inventors who share the name “KONAGA KAZUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORP

4 patents
US10062551B2Aug 28, 2018

Sputtering apparatus and substrate processing apparatus

CANON ANELVA CORP2 citations69
US9322094B2Apr 26, 2016

Film-forming apparatus

CANON ANELVA CORP4 citations69
US9322095B2Apr 26, 2016

Film-forming apparatus

CANON ANELVA CORP2 citations59
US9109285B2Aug 18, 2015

Film-forming apparatus

CANON ANELVA CORP0 citations38

TANAKA YOH

1 patent
US8303785B2Nov 6, 2012

Plasma processing apparatus and electronic device manufacturing method

TANAKA YOH1 citations36