Inventor
SHIMANO TAKAHIRO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SHIMANO TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS9943943B2Apr 17, 2018
Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
EBARA CORP7 citations84
US9156130B2Oct 13, 2015
Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus
EBARA CORP11 citations83
US9108292B2Aug 18, 2015
Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus
EBARA CORP19 citations83
US9302366B2Apr 5, 2016
Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
EBARA CORP2 citations62
US9533395B2Jan 3, 2017
Method and apparatus for conditioning a polishing pad
EBARA CORP1 citations50