Inventor
NOGAMI MAMORU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NOGAMI MAMORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NISSIN ELECTRIC CO LTD
4 patentsUS5003183AMar 26, 1991
Ion implantation apparatus and method of controlling the same
NISSIN ELECTRIC CO LTD83 citations94
US4759681AJul 26, 1988
End station for an ion implantation apparatus
NISSIN ELECTRIC CO LTD66 citations93
US5068539ANov 26, 1991
Ion implantation apparatus
NISSIN ELECTRIC CO LTD26 citations91
US5046148ASep 3, 1991
Ion implantation apparatus
NISSIN ELECTRIC CO LTD13 citations72