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Inventor
HSIEH HENG-CHANG
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “HSIEH HENG-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
1 patent
US7029596B2
Apr 18, 2006
Computer integrated manufacturing control system for oxide chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG
3 citations
57
UNITED MICROELECTRONICS CORP
1 patent
US6438901B1
Aug 27, 2002
Shielding apparatus for protecting a machine
UNITED MICROELECTRONICS CORP
1 citations
38