Inventor
MILLIGAN ROBERT BRENNAN
US15 patents
⚠️ This page may combine multiple inventors who share the name “MILLIGAN ROBERT BRENNAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
13 patentsUS10087522B2Oct 2, 2018
Deposition of metal borides
ASM IP HOLDING BV464 citations99
US10083836B2Sep 25, 2018
Formation of boron-doped titanium metal films with high work function
ASM IP HOLDING BV463 citations99
US10023960B2Jul 17, 2018
Process gas management for an inductively-coupled plasma deposition reactor
ASM IP HOLDING BV467 citations99
US9605342B2Mar 28, 2017
Process gas management for an inductively-coupled plasma deposition reactor
ASM IP HOLDING BV479 citations99
US9412564B2Aug 9, 2016
Semiconductor reaction chamber with plasma capabilities
ASM IP HOLDING BV496 citations99
US9029253B2May 12, 2015
Phase-stabilized thin films, structures and devices including the thin films, and methods of forming same
ASM IP HOLDING BV531 citations99
US9018111B2Apr 28, 2015
Semiconductor reaction chamber with plasma capabilities
ASM IP HOLDING BV532 citations99
US10211308B2Feb 19, 2019
NbMC layers
ASM IP HOLDING BV412 citations98
US11306395B2Apr 19, 2022
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
ASM IP HOLDING BV7 citations84
US12354877B2Jul 8, 2025
Vapor deposition of films comprising molybdenum
ASM IP HOLDING BV4 citations74
US10865475B2Dec 15, 2020
Deposition of metal borides and silicides
ASM IP HOLDING BV2 citations73
US11976361B2May 7, 2024
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
ASM IP HOLDING BV2 citations72
US11233133B2Jan 25, 2022
NbMC layers
ASM IP HOLDING BV0 citations62