Inventor
FAUNE VANESSA
US6 patents
Patents
6 patentsUS11289312B2Mar 29, 2022
Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability
APPLIED MATERIALS INC4 citations71
US11473189B2Oct 18, 2022
Method for particle removal from wafers through plasma modification in pulsed PVD
APPLIED MATERIALS INC2 citations70
US11049701B2Jun 29, 2021
Biased cover ring for a substrate processing system
APPLIED MATERIALS INC3 citations70
US11024490B2Jun 1, 2021
Magnetron having enhanced target cooling configuration
APPLIED MATERIALS INC1 citations60
US11932934B2Mar 19, 2024
Method for particle removal from wafers through plasma modification in pulsed PVD
APPLIED MATERIALS INC0 citations59
US11935732B2Mar 19, 2024
Process kit geometry for particle reduction in PVD processes
APPLIED MATERIALS INC0 citations44