Inventor
ROHLFING FRANZISKA
DE4 patents
Patents
4 patentsUS11401157B2Aug 2, 2022
Micromechanical sensor device with improved liquid tightness protection
BOSCH GMBH ROBERT1 citations59
US12030773B2Jul 9, 2024
Method for producing a wafer connection
BOSCH GMBH ROBERT0 citations49
US10012828B2Jul 3, 2018
Assembly body for micromirror chips, mirror device and production method for a mirror device
BOSCH GMBH ROBERT0 citations49
US10563306B2Feb 18, 2020
Production method for a layer structure and layer structure
BOSCH GMBH ROBERT0 citations47