Inventor
OTA KATSUHIRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “OTA KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
6 patentsUS6758872B2Jul 6, 2004
Polishing slurry
HITACHI LTD26 citations92
US6656021B2Dec 2, 2003
Process for fabricating a semiconductor device
HITACHI LTD24 citations92
US6656022B2Dec 2, 2003
Method for polishing a semiconductor substrate member
HITACHI LTD17 citations92
US5409544AApr 25, 1995
Method of controlling adhesion of fine particles to an object in liquid
HITACHI LTD24 citations92
US6029679AFeb 29, 2000
Semiconductor cleaning and production methods using a film repulsing fine particle contaminants
HITACHI LTD17 citations83
US6514864B2Feb 4, 2003
Fabrication method for semiconductor integrated circuit device
HITACHI LTD7 citations72