Inventor

STEPHENS DONALD EDGAR

US3 patents

⚠️ This page may combine multiple inventors who share the name “STEPHENS DONALD EDGAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US6345404B1Feb 12, 2002

Wafer cleaning apparatus

LAM RES CORP23 citations89

US6143089ANov 7, 2000

Method of cleaning semiconductor wafers and other substrates

LAM RES CORP27 citations89

OLIVER DESIGN INC

1 patent

US5875507AMar 2, 1999

Wafer cleaning apparatus

OLIVER DESIGN INC64 citations93