Inventor

RADOVANOV SVETLANA

US23 patents

⚠️ This page may combine multiple inventors who share the name “RADOVANOV SVETLANA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RADOVANOV SVETLANA

APPLIED MATERIALS INC

Shaped electrode

Ion source with single-slot tubular cathode

Ion source with tubular cathode

Single-slot tubular cathode

Ion source with single-slot tubular cathode

Ion source with tubular cathode

VARIAN SEMICONDUCTOR EQUIPMENT

Ion source

Ion implanter having two-stage deceleration beamline

Techniques for independently controlling deflection, deceleration and focus of an ion beam

Techniques for providing a multimode ion source

Techniques for providing a multimode ion source

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Control of ion angular distribution of ion beams with hidden deflection electrode

Apparatus and method for controlling ion beam properties using energy filter

Apparatus and method for mass analyzed ion beam

Inductively coupled RF plasma source with magnetic confinement and Faraday shielding

RADOVANOV SVETLANA

Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam

Deceleration lens

Method of ionization

GODET LUDOVIC

Plasma processing apparatus

Method to generate molecular ions from ions with a smaller atomic mass

SINCLAIR FRANK

System and method for manipulating an ion beam

BUFF JAMES S

Techniques for improving extracted ion beam quality using high-transparency electrodes

MAYNARD HELEN

Pulsed plasma to affect conformal processing