Inventor

ROOT FRANKLIN D

US2 patents

⚠️ This page may combine multiple inventors who share the name “ROOT FRANKLIN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM IPEC CORP

1 patent

US6309279B1Oct 30, 2001

Arrangements for wafer polishing

SPEEDFAM IPEC CORP64 citations93

NOVELLUS SYSTEMS INC

1 patent

US7229339B2Jun 12, 2007

CMP apparatus and method

NOVELLUS SYSTEMS INC12 citations77