Inventor
IKEYA NAOHISA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “IKEYA NAOHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
4 patentsUS10896831B2Jan 19, 2021
Film forming apparatus
NUFLARE TECHNOLOGY INC1 citations61
US8008168B2Aug 30, 2011
Method and apparatus for manufacturing semiconductor device
NUFLARE TECHNOLOGY INC1 citations49
US10745824B2Aug 18, 2020
Film forming apparatus
NUFLARE TECHNOLOGY INC0 citations40
US10157768B2Dec 18, 2018
Substrate processing apparatus, transfer method, and susceptor
NUFLARE TECHNOLOGY INC0 citations39