Inventor
NAITO MASAMI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “NAITO MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DENSO CORP
7 patentsUS6297100B1Oct 2, 2001
Method of manufacturing silicon carbide semiconductor device using active and inactive ion species
DENSO CORP107 citations98
US7147714B2Dec 12, 2006
Manufacturing method of silicon carbide single crystals
DENSO CORP16 citations92
US6853006B2Feb 8, 2005
Silicon carbide semiconductor device
DENSO CORP41 citations92
US6746787B2Jun 8, 2004
Manufacturing method of silicon carbide single crystals
DENSO CORP9 citations73
US9879359B2Jan 30, 2018
Silicon carbide semiconductor film-forming apparatus and film-forming method using the same
DENSO CORP2 citations72
US8704340B2Apr 22, 2014
Stacked single crystal compound semiconductor substrates
DENSO CORP0 citations49
US9337276B2May 10, 2016
Silicon carbide semiconductor device having junction barrier Schottky diode
DENSO CORP0 citations39
NUFLARE TECHNOLOGY INC
5 patentsUS9518322B2Dec 13, 2016
Film formation apparatus and film formation method
NUFLARE TECHNOLOGY INC11 citations83
US9873941B2Jan 23, 2018
Film-forming manufacturing apparatus and method
NUFLARE TECHNOLOGY INC5 citations72
US10896831B2Jan 19, 2021
Film forming apparatus
NUFLARE TECHNOLOGY INC1 citations61
US9570337B2Feb 14, 2017
Film formation apparatus and film formation method
NUFLARE TECHNOLOGY INC1 citations51
US10584417B2Mar 10, 2020
Film forming apparatus, susceptor, and film forming method
NUFLARE TECHNOLOGY INC0 citations41