Inventor
FUJIBAYASHI HIROAKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “FUJIBAYASHI HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
6 patentsUS9518322B2Dec 13, 2016
Film formation apparatus and film formation method
NUFLARE TECHNOLOGY INC11 citations83
US9873941B2Jan 23, 2018
Film-forming manufacturing apparatus and method
NUFLARE TECHNOLOGY INC5 citations72
US10896831B2Jan 19, 2021
Film forming apparatus
NUFLARE TECHNOLOGY INC1 citations61
US9570337B2Feb 14, 2017
Film formation apparatus and film formation method
NUFLARE TECHNOLOGY INC1 citations51
US10584417B2Mar 10, 2020
Film forming apparatus, susceptor, and film forming method
NUFLARE TECHNOLOGY INC0 citations41
US10745824B2Aug 18, 2020
Film forming apparatus
NUFLARE TECHNOLOGY INC0 citations40
DENSO CORP
5 patentsUS9879359B2Jan 30, 2018
Silicon carbide semiconductor film-forming apparatus and film-forming method using the same
DENSO CORP2 citations72
US11879171B2Jan 23, 2024
Semiconductor manufacturing device
DENSO CORP0 citations51
US12188151B2Jan 7, 2025
Silicon carbide wafer and method for manufacturing the same
DENSO CORP0 citations50
US8704340B2Apr 22, 2014
Stacked single crystal compound semiconductor substrates
DENSO CORP0 citations49
US12252791B2Mar 18, 2025
Apparatus for manufacturing semiconductor device
DENSO CORP0 citations44