Inventor
ADACHI AYUMU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “ADACHI AYUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
3 patentsUS9518322B2Dec 13, 2016
Film formation apparatus and film formation method
NUFLARE TECHNOLOGY INC11 citations83
US9873941B2Jan 23, 2018
Film-forming manufacturing apparatus and method
NUFLARE TECHNOLOGY INC5 citations72
US9570337B2Feb 14, 2017
Film formation apparatus and film formation method
NUFLARE TECHNOLOGY INC1 citations51
URAKAMI YASUSHI
3 patentsUS8936682B2Jan 20, 2015
Method of manufacturing homogeneous silicon carbide single crystal with low potential of generating defects
URAKAMI YASUSHI3 citations58
US9145622B2Sep 29, 2015
Manufacturing method of silicon carbide single crystal
URAKAMI YASUSHI0 citations37
US9051663B2Jun 9, 2015
Manufacturing method of silicon carbide single crystal
URAKAMI YASUSHI0 citations37