Inventor
THOMAS TERENCE M
US24 patents
⚠️ This page may combine multiple inventors who share the name “THOMAS TERENCE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RODEL INC
10 patentsUS6607424B1Aug 19, 2003
Compositions for insulator and metal CMP and methods relating thereto
RODEL INC47 citations94
US6605537B2Aug 12, 2003
Polishing of metal substrates
RODEL INC35 citations92
US6475069B1Nov 5, 2002
Control of removal rates in CMP
RODEL INC21 citations92
US6602112B2Aug 5, 2003
Dissolution of metal particles produced by polishing
RODEL INC22 citations91
US6447373B1Sep 10, 2002
Chemical mechanical polishing slurries for metal
RODEL INC21 citations91
US6699299B2Mar 2, 2004
Composition and method for polishing in metal CMP
RODEL INC34 citations90
US6616717B2Sep 9, 2003
Composition and method for polishing in metal CMP
RODEL INC28 citations90
US6379406B1Apr 30, 2002
Polishing compositions for semiconductor substrates
RODEL INC34 citations90
US6641631B2Nov 4, 2003
Polishing of semiconductor substrates
RODEL INC14 citations82
US6530824B2Mar 11, 2003
Method and composition for polishing by CMP
RODEL INC15 citations80
ROHM & HAAS ELECT MAT
9 patentsUS7387964B2Jun 17, 2008
Copper polishing cleaning solution
ROHM & HAAS ELECT MAT24 citations92
US6971945B2Dec 6, 2005
Multi-step polishing solution for chemical mechanical planarization
ROHM & HAAS ELECT MAT21 citations91
US7132058B2Nov 7, 2006
Tungsten polishing solution
ROHM & HAAS ELECT MAT15 citations77
US7253111B2Aug 7, 2007
Barrier polishing solution
ROHM & HAAS ELECT MAT9 citations72
US7084059B2Aug 1, 2006
CMP system for metal deposition
ROHM & HAAS ELECT MAT6 citations62
US7270762B2Sep 18, 2007
Polishing compositions for noble metals
ROHM & HAAS ELECT MAT2 citations61
US7785487B2Aug 31, 2010
Polymeric barrier removal polishing slurry
ROHM & HAAS ELECT MAT3 citations60
US8563436B2Oct 22, 2013
Chemical mechanical polishing composition and methods relating thereto
ROHM & HAAS ELECT MAT0 citations51
US7070485B2Jul 4, 2006
Polishing composition
ROHM & HAAS ELECT MAT1 citations51