Inventor

KVASNICA SAMUEL

AT2 patents

Patents

2 patents

US7687783B2Mar 30, 2010

Multi-beam deflector array device for maskless particle-beam processing

IMS NANOFABRICATION AG34 citations89

US9568907B2Feb 14, 2017

Correction of short-range dislocations in a multi-beam writer

IMS NANOFABRICATION AG18 citations82