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Inventor
KATADA OSAMU
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “KATADA OSAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
1 patent
US6801295B2
Oct 5, 2004
Post exposure modification of critical dimensions in mask fabrication
INTEL CORP
5 citations
69
SIGMAMELTEC LTD
1 patent
US6399926B2
Jun 4, 2002
Heat-treating apparatus capable of high temperature uniformity
SIGMAMELTEC LTD
6 citations
50