Inventor
YUN CHANG-HAN
US3 patents
Patents
3 patentsUS6933163B2Aug 23, 2005
Fabricating integrated micro-electromechanical systems using an intermediate electrode layer
ANALOG DEVICES INC14 citations81
US6964882B2Nov 15, 2005
Fabricating complex micro-electromechanical systems using a flip bonding technique
ANALOG DEVICES INC11 citations71
US6931170B2Aug 16, 2005
Fiber-attached optical devices with in-plane micromachined mirrors
ANALOG DEVICES INC8 citations71