Inventor

ABDELRAHMAN MAGDY S

US2 patents

Patents

2 patents

US7659196B2Feb 9, 2010

Soluble hard mask for interlayer dielectric patterning

INTEL CORP3 citations56

US7649264B2Jan 19, 2010

Hard mask for low-k interlayer dielectric patterning

INTEL CORP0 citations36