P

Inventor

WEBB R KYLE

US39 patents
⚠️ This page may combine multiple inventors who share the name “WEBB R KYLE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

16 patents
US6208675B1Mar 27, 2001

Blower assembly for a pulsed laser system incorporating ceramic bearings

CYMER INC193 citations99
US6208674B1Mar 27, 2001

Laser chamber with fully integrated electrode feedthrough main insulator

CYMER INC187 citations99
US6128323AOct 3, 2000

Reliable modular production quality narrow-band high REP rate excimer laser

CYMER INC284 citations99
US6104735AAug 15, 2000

Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly

CYMER INC167 citations99
US5870420AFeb 9, 1999

Cross-flow blower with braces

CYMER INC56 citations96
US6928093B2Aug 9, 2005

Long delay and high TIS pulse stretcher

CYMER INC81 citations95
US6904073B2Jun 7, 2005

High power deep ultraviolet laser with long life optics

CYMER INC78 citations95
US7180081B2Feb 20, 2007

Discharge produced plasma EUV light source

CYMER INC16 citations92
US6914919B2Jul 5, 2005

Six to ten KHz, or greater gas discharge laser system

CYMER INC34 citations92
US6704339B2Mar 9, 2004

Lithography laser with beam delivery and beam pointing control

CYMER INC50 citations91
US6034984AMar 7, 2000

Tangential fan with cutoff assembly and vibration control for electric discharge laser

CYMER INC17 citations84
US7230964B2Jun 12, 2007

Lithography laser with beam delivery and beam pointing control

CYMER INC17 citations81
US6188709B1Feb 13, 2001

Aerodynamic electrode support bar

CYMER INC13 citations74
US6144686ANov 7, 2000

Tangential fan with cutoff assembly and vibration control for electric discharge laser

CYMER INC6 citations63
US7402825B2Jul 22, 2008

LPP EUV drive laser input system

CYMER INC6 citations60
US7190707B2Mar 13, 2007

Gas discharge laser light source beam delivery unit

CYMER INC2 citations57

ACUFOCUS INC

15 patents

INTRALASE CORP

7 patents

US NAVY

1 patent