Inventor

CHUNG FENG-CHI

TW3 patents

Patents

3 patents

US10261504B2Apr 16, 2019

Virtual metrology system and method

UNITED MICROELECTRONICS CORP2 citations68

US10935969B2Mar 2, 2021

Virtual metrology system and method

UNITED MICROELECTRONICS CORP1 citations57

US10606253B2Mar 31, 2020

Method of monitoring processing system for processing substrate

UNITED MICROELECTRONICS CORP0 citations28