Inventor
NOZAWA OSAMU
JP107 patents
⚠️ This page may combine multiple inventors who share the name “NOZAWA OSAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYA CORP
47 patentsUS6287429B1Sep 11, 2001
Magnetic recording medium having an improved magnetic characteristic
HOYA CORP87 citations98
US6335124B1Jan 1, 2002
Phase shift mask and phase shift mask blank
HOYA CORP72 citations96
US6743553B2Jun 1, 2004
Halftone phase shift mask and mask blank
HOYA CORP21 citations92
US6087047AJul 11, 2000
Phase shift mask and phase shift mask blank
HOYA CORP36 citations92
US5968679AOct 19, 1999
Magnetic recording medium and method of manufacturing the same
HOYA CORP29 citations92
US5900324AMay 4, 1999
Magnetic recording media, methods for producing the same and magnetic recorders
HOYA CORP50 citations92
US7935461B2May 3, 2011
Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank
HOYA CORP7 citations84
US7011910B2Mar 14, 2006
Halftone-type phase-shift mask blank, and halftone-type phase-shift mask
HOYA CORP13 citations84
US7115341B2Oct 3, 2006
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same
HOYA CORP14 citations83
US6783634B2Aug 31, 2004
Manufacturing method and apparatus of phase shift mask blank
HOYA CORP12 citations82
US7955762B2Jun 7, 2011
Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film
HOYA CORP5 citations74
US7060394B2Jun 13, 2006
Halftone phase-shift mask blank and halftone phase-shift mask
HOYA CORP8 citations74
US6723477B2Apr 20, 2004
Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask
HOYA CORP6 citations74
US6677087B2Jan 13, 2004
Phase shift mask blank, phase shift mask, and method for manufacturing the same
HOYA CORP10 citations74
US11762279B2Sep 19, 2023
Mask blank, method for manufacturing reflective mask, and method for manufacturing semiconductor device
HOYA CORP3 citations73
US11281089B2Mar 22, 2022
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
HOYA CORP4 citations73
US10915016B2Feb 9, 2021
Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
HOYA CORP3 citations73
US10606164B2Mar 31, 2020
Mask blank, phase shift mask, and method for manufacturing semiconductor device
HOYA CORP2 citations73
US10551734B2Feb 4, 2020
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
HOYA CORP2 citations73
US10539866B2Jan 21, 2020
Mask blank, phase-shift mask, and method of manufacturing semiconductor device
HOYA CORP2 citations73
US10481486B2Nov 19, 2019
Mask blank, phase shift mask, and method for manufacturing semiconductor device
HOYA CORP4 citations73
US10365556B2Jul 30, 2019
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
HOYA CORP2 citations73
US10146123B2Dec 4, 2018
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
HOYA CORP3 citations73
US10114281B2Oct 30, 2018
Mask blank, phase shift mask, and method for manufacturing semiconductor device
HOYA CORP4 citations73
US10101650B2Oct 16, 2018
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device
HOYA CORP2 citations73
US10088744B2Oct 2, 2018
Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device
HOYA CORP4 citations73
US9625805B2Apr 18, 2017
Reflective mask blank, reflective mask and method of manufacturing reflective mask
HOYA CORP2 citations73
US9625806B2Apr 18, 2017
Mask blank, phase-shift mask, and method for manufacturing the same
HOYA CORP3 citations73
US6395434B1May 28, 2002
Phase shift mask and phase shift mask blank
HOYA CORP8 citations73
US5954927ASep 21, 1999
Method of manufacturing magnetic recording medium
HOYA CORP12 citations73
US5824427AOct 20, 1998
Magnetic recording media and methods for producing the same
HOYA CORP9 citations73
US5746893AMay 5, 1998
Method of manufacturing magnetic recording medium
HOYA CORP6 citations73
US6844119B2Jan 18, 2005
Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask
HOYA CORP9 citations72
US6740208B2May 25, 2004
Photo mask blank and method of manufacturing the same
HOYA CORP9 citations72
US11333966B2May 17, 2022
Mask blank, phase shift mask, and method of manufacturing semiconductor device
HOYA CORP2 citations70
US6762000B2Jul 13, 2004
Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks
HOYA CORP10 citations70
US12468217B2Nov 11, 2025
Mask blank, method of manufacturing transfer mask, and method of manufacturing semiconductor device
HOYA CORP1 citations64
US11231645B2Jan 25, 2022
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
HOYA CORP0 citations63
US11226549B2Jan 18, 2022
Mask blank, phase shift mask, method for manufacturing thereof, and method for manufacturing semiconductor device
HOYA CORP0 citations63
US10261409B2Apr 16, 2019
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
HOYA CORP1 citations63
US9195133B2Nov 24, 2015
Mask blank, transfer mask and method of manufacturing transfer mask
HOYA CORP1 citations63
US9140980B2Sep 22, 2015
Method of manufacturing a transfer mask and method of manufacturing a semiconductor device
HOYA CORP2 citations63
US7402228B2Jul 22, 2008
Manufacturing method and apparatus of phase shift mask blank
HOYA CORP1 citations63
US7282121B2Oct 16, 2007
Manufacturing method and apparatus of phase shift mask blank
HOYA CORP2 citations63
US6746806B2Jun 8, 2004
Lithography mask blank and method of manufacturing the same
HOYA CORP6 citations63
US12529953B2Jan 20, 2026
Mask blank, phase shift mask, and method of manufacturing semiconductor device
HOYA CORP0 citations62
US12411402B2Sep 9, 2025
Reflective mask blank, reflective mask, and method for manufacturing semiconductor device
HOYA CORP0 citations62
NOZAWA OSAMU
2 patentsHASHIMOTO MASAHIRO
1 patentShowing the top 50 of 107 patents by PatentIndex Score.