P

Inventor

SHIBATA MIKI

JP4 patents
⚠️ This page may combine multiple inventors who share the name “SHIBATA MIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents
US5885134AMar 23, 1999

Polishing apparatus

EBARA CORP81 citations95
US6074276AJun 13, 2000

Polishing apparatus

EBARA CORP22 citations91
USRE38215EAug 12, 2003

Polishing apparatus

EBARA CORP4 citations61

PRESIDENT OF TOYAMA UNIVERSITY

1 patent
US6992781B2Jan 31, 2006

Film thickness measuring method and measuring apparatus for organic thin film for use in organic electroluminesce device

PRESIDENT OF TOYAMA UNIVERSITY15 citations80