Inventor

LOOMIS PAUL A

US2 patents

Patents

2 patents

US6194734B1Feb 27, 2001

Method and system for operating a variable aperture in an ion implanter

AXCELIS TECH INC32 citations90

US6207964B1Mar 27, 2001

Continuously variable aperture for high-energy ion implanter

AXCELIS TECH INC48 citations87