Inventor
RUTISHAUSER HANS J
US3 patents
Patents
3 patentsUS6194734B1Feb 27, 2001
Method and system for operating a variable aperture in an ion implanter
AXCELIS TECH INC32 citations90
US6207964B1Mar 27, 2001
Continuously variable aperture for high-energy ion implanter
AXCELIS TECH INC48 citations87
US6774378B1Aug 10, 2004
Method of tuning electrostatic quadrupole electrodes of an ion beam implanter
AXCELIS TECH INC16 citations82