P

Inventor

WU XIAOWEI

CN54 patents
⚠️ This page may combine multiple inventors who share the name “WU XIAOWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

21 patents
US10573497B2Feb 25, 2020

Multi-layer plasma resistant coating by atomic layer deposition

APPLIED MATERIALS INC9 citations84
US10443126B1Oct 15, 2019

Zone-controlled rare-earth oxide ALD and CVD coatings

APPLIED MATERIALS INC7 citations84
US10443125B2Oct 15, 2019

Flourination process to create sacrificial oxy-flouride layer

APPLIED MATERIALS INC6 citations84
US10186400B2Jan 22, 2019

Multi-layer plasma resistant coating by atomic layer deposition

APPLIED MATERIALS INC12 citations84
US10755900B2Aug 25, 2020

Multi-layer plasma erosion protection for chamber components

APPLIED MATERIALS INC7 citations83
US11562890B2Jan 24, 2023

Corrosion resistant ground shield of processing chamber

APPLIED MATERIALS INC4 citations75
US11667578B2Jun 6, 2023

Methods of making nanopowders, nanoceramic materials and nanoceramic components

APPLIED MATERIALS INC1 citations73
US11667575B2Jun 6, 2023

Erosion resistant metal oxide coatings

APPLIED MATERIALS INC3 citations73
US11279656B2Mar 22, 2022

Nanopowders, nanoceramic materials and methods of making and use thereof

APPLIED MATERIALS INC2 citations73
US11251023B2Feb 15, 2022

Multi-layer plasma resistant coating by atomic layer deposition

APPLIED MATERIALS INC2 citations73
US11180847B2Nov 23, 2021

Atomic layer deposition coatings for high temperature ceramic components

APPLIED MATERIALS INC3 citations73
US11008653B2May 18, 2021

Multi-layer coating with diffusion barrier layer and erosion resistant layer

APPLIED MATERIALS INC2 citations73
US10563303B2Feb 18, 2020

Metal oxy-flouride films based on oxidation of metal flourides

APPLIED MATERIALS INC2 citations73
US12442072B2Oct 14, 2025

Atomic layer deposition coatings for high temperature ceramic components

APPLIED MATERIALS INC0 citations63
US12209307B2Jan 28, 2025

Zone-controlled rare-earth oxide ALD and CVD coatings

APPLIED MATERIALS INC0 citations63
US12049696B2Jul 30, 2024

Plasma resistant process chamber lid

APPLIED MATERIALS INC0 citations63
US12548742B2Feb 10, 2026

Corrosion resistant ground shield of processing chamber

APPLIED MATERIALS INC0 citations62
US12098107B2Sep 24, 2024

Methods of making nanopowders, nanoceramic materials and nanoceramic components

APPLIED MATERIALS INC0 citations62
US12002657B2Jun 4, 2024

Multi-layer plasma resistant coating by atomic layer deposition

APPLIED MATERIALS INC0 citations62
US12497692B2Dec 16, 2025

Halogen resistant coatings and methods of making and using thereof

APPLIED MATERIALS INC0 citations59
US11639547B2May 2, 2023

Halogen resistant coatings and methods of making and using thereof

APPLIED MATERIALS INC0 citations59

AIRGAIN INC

11 patents

SEAGATE TECHNOLOGY LLC

5 patents

BLACKBERRY LTD

5 patents

PRELUDE THERAPEUTICS INC

2 patents

JU GANPING

1 patent

RENSSELAER POLYTECH INST

1 patent

APPLE INC

1 patent

CARRIER CORP

1 patent

JURY JASON CHARLES

1 patent

PENG YINGGUO

1 patent

Showing the top 50 of 54 patents by PatentIndex Score.