Inventor
TAKIMOTO MASARU
JP5 patents
Patents
5 patentsUS11477858B2Oct 18, 2022
Sheath heater
NHK SPRING CO LTD2 citations68
US10435792B2Oct 8, 2019
Laminate and method of fabricating laminate
NHK SPRING CO LTD1 citations59
US12247296B2Mar 11, 2025
Member for plasma processing device
NHK SPRING CO LTD1 citations55
US12338852B2Jun 24, 2025
Joined body
NHK SPRING CO LTD0 citations49
US12598949B2Apr 7, 2026
Stage and method of manufacturing stage
NHK SPRING CO LTD0 citations45