Inventor
HOFMEISTER CHRISTOPHER
US109 patents
⚠️ This page may combine multiple inventors who share the name “HOFMEISTER CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
18 patentsUS7988398B2Aug 2, 2011
Linear substrate transport apparatus
BROOKS AUTOMATION INC141 citations99
US5899658AMay 4, 1999
Articulated arm transfer device
BROOKS AUTOMATION INC146 citations99
US5720590AFeb 24, 1998
Articulated arm transfer device
BROOKS AUTOMATION INC112 citations99
US7959395B2Jun 14, 2011
Substrate processing apparatus
BROOKS AUTOMATION INC92 citations98
US7575406B2Aug 18, 2009
Substrate processing apparatus
BROOKS AUTOMATION INC118 citations98
US5813823ASep 29, 1998
Articulated arm transfer device
BROOKS AUTOMATION INC69 citations96
US7904182B2Mar 8, 2011
Scalable motion control system
BROOKS AUTOMATION INC41 citations94
US5778968AJul 14, 1998
Method for heating or cooling wafers
BROOKS AUTOMATION INC71 citations94
US6364592B1Apr 2, 2002
Small footprint carrier front end loader
BROOKS AUTOMATION INC35 citations93
US6120229ASep 19, 2000
Substrate carrier as batchloader
BROOKS AUTOMATION INC33 citations93
US9224628B2Dec 29, 2015
Reduced capacity carrier, transport, load port, buffer system
BROOKS AUTOMATION INC16 citations92
US8008884B2Aug 30, 2011
Substrate processing apparatus with motors integral to chamber walls
BROOKS AUTOMATION INC32 citations92
US7806643B2Oct 5, 2010
Elevator-based tool loading and buffering system
BROOKS AUTOMATION INC27 citations92
US7607879B2Oct 27, 2009
Substrate processing apparatus with removable component module
BROOKS AUTOMATION INC36 citations91
US9570330B2Feb 14, 2017
Substrate processing apparatus
BROOKS AUTOMATION INC6 citations84
US8827617B2Sep 9, 2014
Substrate processing apparatus
BROOKS AUTOMATION INC8 citations84
US7798758B2Sep 21, 2010
Reduced capacity carrier, transport, load port, buffer system
BROOKS AUTOMATION INC16 citations84
US7522267B2Apr 21, 2009
Substrate transport apparatus with automated alignment
BROOKS AUTOMATION INC14 citations83
PERSIMMON TECHNOLOGIES CORP
8 patentsUS10424498B2Sep 24, 2019
Substrate transport vacuum platform
PERSIMMON TECHNOLOGIES CORP14 citations94
US9196518B1Nov 24, 2015
Adaptive placement system and method
PERSIMMON TECHNOLOGIES CORP46 citations94
US9842757B2Dec 12, 2017
Robot and adaptive placement system and method
PERSIMMON TECHNOLOGIES CORP19 citations93
US9149936B2Oct 6, 2015
Robot having arm with unequal link lengths
PERSIMMON TECHNOLOGIES CORP27 citations93
US8716909B2May 6, 2014
Robot with heat dissipating stator
PERSIMMON TECHNOLOGIES CORP16 citations92
US10800050B2Oct 13, 2020
Robot linear drive heat transfer
PERSIMMON TECHNOLOGIES CORP8 citations84
US10541167B2Jan 21, 2020
Substrate transport vacuum platform
PERSIMMON TECHNOLOGIES CORP4 citations84
US10269604B2Apr 23, 2019
Substrate transport vacuum platform
PERSIMMON TECHNOLOGIES CORP9 citations84
HOSEK MARTIN
5 patentsUS8803513B2Aug 12, 2014
Multiple dimension position sensor
HOSEK MARTIN69 citations96
US8129984B2Mar 6, 2012
Multiple dimension position sensor
HOSEK MARTIN51 citations96
US10569430B2Feb 25, 2020
Low variability robot
HOSEK MARTIN10 citations84
US8960099B2Feb 24, 2015
Substrate processing apparatus
HOSEK MARTIN9 citations84
US8222892B2Jul 17, 2012
Sensor for simultaneous position and gap measurement
HOSEK MARTIN12 citations84
HOFMEISTER CHRISTOPHER
5 patentsUS8602706B2Dec 10, 2013
Substrate processing apparatus
HOFMEISTER CHRISTOPHER25 citations92
US8562271B2Oct 22, 2013
Compact substrate transport system
HOFMEISTER CHRISTOPHER24 citations92
US8272825B2Sep 25, 2012
Load lock fast pump vent
HOFMEISTER CHRISTOPHER33 citations90
US8651789B2Feb 18, 2014
Substrate processing apparatus
HOFMEISTER CHRISTOPHER6 citations84
US8267636B2Sep 18, 2012
Substrate transport apparatus
HOFMEISTER CHRISTOPHER9 citations84
GILCHRIST ULYSSES
3 patentsKRUPYSHEV ALEXANDER G
3 patentsUS9623555B2Apr 18, 2017
Dual arm robot
KRUPYSHEV ALEXANDER G15 citations92
US8680803B2Mar 25, 2014
Substrate processing apparatus with motors integral to chamber walls
KRUPYSHEV ALEXANDER G5 citations83
US8237391B2Aug 7, 2012
Substrate processing apparatus with motors integral to chamber walls
KRUPYSHEV ALEXANDER G10 citations83
BUFANO MICHAEL L
3 patentsUS8272827B2Sep 25, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L26 citations91
US8328495B2Dec 11, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L13 citations83
US8267634B2Sep 18, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L19 citations83
PERSIMMON TECH CORPORATION
2 patentsBROOKS AUTOMATION
1 patentALERT INNOVATION INC
1 patentHOLTKAMP WILLIAM
1 patentShowing the top 50 of 109 patents by PatentIndex Score.