Inventor
SHAN HOMGQING
US3 patents
Patents
3 patentsUS6192827B1Feb 27, 2001
Double slit-valve doors for plasma processing
APPLIED MATERIALS INC108 citations98
US7147719B2Dec 12, 2006
Double slit-valve doors for plasma processing
APPLIED MATERIALS INC17 citations92
US6647918B1Nov 18, 2003
Double slit-valve doors for plasma processing
APPLIED MATERIALS INC13 citations83