Inventor
KANG HYUN-TAE
KR3 patents
Patents
3 patentsUS6826743B2Nov 30, 2004
Method for automatically correcting overlay alignment of a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD18 citations80
US7081952B2Jul 25, 2006
Method and apparatus for obtaining an image using a selective combination of wavelengths of light
SAMSUNG ELECTRONICS CO LTD2 citations59
US7693682B2Apr 6, 2010
Method for measuring critical dimensions of a pattern using an overlay measuring apparatus
SAMSUNG ELECTRONICS CO LTD0 citations36