Inventor
NEOH SOON EE
SG7 patents
Patents
7 patentsUS6184104B1Feb 6, 2001
Alignment mark strategy for oxide CMP
CHARTERED SEMICONDUCTOR MFG23 citations92
US6146969ANov 14, 2000
Printing optimized global alignment mark at contact/via layers
CHARTERED SEMICONDUCTOR MFG30 citations88
US6352904B2Mar 5, 2002
Alignment mark strategy for oxide CMP
CHARTERED SEMICONDUCTOR MFG15 citations83
US6303451B1Oct 16, 2001
Method for forming a transistor within an integrated circuit
CHARTERED SEMICONDUCTOR MFG16 citations81
US6235437B1May 22, 2001
Multi-segment global alignment mark
CHARTERED SEMICONDUCTOR MFG10 citations70
US6022649AFeb 8, 2000
Wafer stepper method utilizing a multi-segment global alignment mark
CHARTERED SEMICONDUCTOR MFG5 citations70
US6395086B1May 28, 2002
Shield for wafer station
CHARTERED SEMICONDUCTOR MFG2 citations60