Inventor
JE SUNG TAE
KR22 patents
⚠️ This page may combine multiple inventors who share the name “JE SUNG TAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUGENE TECHNOLOGY CO LTD
19 patentsUS9620395B2Apr 11, 2017
Apparatus for processing substrate for supplying reaction gas having phase difference
EUGENE TECHNOLOGY CO LTD9 citations83
US9593415B2Mar 14, 2017
Substrate processing apparatus including auxiliary gas supply port
EUGENE TECHNOLOGY CO LTD7 citations83
US10145012B2Dec 4, 2018
Substrate processing apparatus and substrate processing method
EUGENE TECHNOLOGY CO LTD12 citations79
US10287687B2May 14, 2019
Substrate processing device
EUGENE TECHNOLOGY CO LTD3 citations73
US9875895B2Jan 23, 2018
Substrate processing apparatus including exhaust ports and substrate processing method
EUGENE TECHNOLOGY CO LTD5 citations72
US10337103B2Jul 2, 2019
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD5 citations71
US10161036B2Dec 25, 2018
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD4 citations71
US9758870B2Sep 12, 2017
Substrate treatment apparatus, and method for controlling temperature of heater
EUGENE TECHNOLOGY CO LTD3 citations71
US10840118B2Nov 17, 2020
Substrate processing apparatus and method for assembling tube assembly
EUGENE TECHNOLOGY CO LTD3 citations70
US10741396B2Aug 11, 2020
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD4 citations70
US10364494B2Jul 30, 2019
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD2 citations70
US10192760B2Jan 29, 2019
Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
EUGENE TECHNOLOGY CO LTD2 citations69
US10593545B2Mar 17, 2020
Method for substrate processing using exhaust ports
EUGENE TECHNOLOGY CO LTD0 citations51
US9953850B2Apr 24, 2018
Substrate processing apparatus including heat-shield plate
EUGENE TECHNOLOGY CO LTD1 citations51
US11488845B2Nov 1, 2022
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations49
US10622228B2Apr 14, 2020
Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
EUGENE TECHNOLOGY CO LTD0 citations48
US11242601B2Feb 8, 2022
Showerhead and substrate processing apparatus including the same
EUGENE TECHNOLOGY CO LTD0 citations44
US10793949B2Oct 6, 2020
Substrate processing apparatus and substrate processing method using the same
EUGENE TECHNOLOGY CO LTD0 citations40
US10199225B2Feb 5, 2019
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations38