Inventor

LIOU YU-CHIH

TW3 patents

⚠️ This page may combine multiple inventors who share the name “LIOU YU-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US7995323B2Aug 9, 2011

Method and apparatus for securely dechucking wafers

TAIWAN SEMICONDUCTOR MFG7 citations79

US8000081B2Aug 16, 2011

Method and apparatus for safely dechucking wafers

TAIWAN SEMICONDUCTOR MFG2 citations58

LU CHUNG-TSUNG

1 patent

US8416555B2Apr 9, 2013

System for securely dechucking wafers

LU CHUNG-TSUNG5 citations63