Inventor

CHOI YIN FONG

NL2 patents

⚠️ This page may combine multiple inventors who share the name “CHOI YIN FONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7992115B2Aug 2, 2011

Overlay measurement on double patterning substrate

ASML NETHERLANDS BV12 citations77

VAN DER HEIJDEN EDDY CORNELIS ANTONIUS

1 patent

US8119333B2Feb 21, 2012

Lithographic method

VAN DER HEIJDEN EDDY CORNELIS ANTONIUS0 citations38