Inventor
HEO JINSEOK
KR7 patents
Patents
7 patentsUS9857690B2Jan 2, 2018
Extreme ultraviolet generation device and exposure system including the same
SAMSUNG ELECTRONICS CO LTD6 citations82
US10754254B1Aug 25, 2020
Extreme ultraviolet (EUV) exposure apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD9 citations80
US9979043B2May 22, 2018
Three dimensional secondary battery including elastic member and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US10312512B2Jun 4, 2019
Cathode of three-dimensional lithium secondary battery and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US12149247B2Nov 19, 2024
Frequency divider and memory device including the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US11086224B2Aug 10, 2021
Fabrication system of semiconductor device and method of fabricating a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US11086210B2Aug 10, 2021
Photomask, method of fabricating the same, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations55