Inventor
DOOLITTLE JAMES
US3 patents
Patents
3 patentsUS6004440ADec 21, 1999
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC117 citations96
US6139703AOct 31, 2000
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC67 citations94
US5379651AJan 10, 1995
Point optical beam electronic rotometer
SEMITOOL INC20 citations80