Inventor

JACOBS JOHANNES ANDREAS HENRIC

NL2 patents

Patents

2 patents

US7307689B2Dec 11, 2007

Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing

ASML NETHERLANDS BV10 citations78

US6933513B2Aug 23, 2005

Gas flushing system for use in lithographic apparatus

ASML NETHERLANDS BV9 citations69