Inventor
REKKERS ERIK MARIA
NL6 patents
Patents
6 patentsUS7307689B2Dec 11, 2007
Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing
ASML NETHERLANDS BV10 citations78
US9785051B2Oct 10, 2017
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV5 citations72
US9927711B2Mar 27, 2018
Actuation mechanism, optical apparatus and lithography apparatus
ASML NETHERLANDS BV3 citations68
US11131937B2Sep 28, 2021
Positioning device, stiffness reduction device and electron beam apparatus
ASML NETHERLANDS BV0 citations57
US7307688B2Dec 11, 2007
Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatus
ASML NETHERLANDS BV4 citations56
US9494878B2Nov 15, 2016
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations40